Mini diaphragm pressure gauge

Applications: 

• Gaseous and liquid aggressive media 

• High purity applications 

• Semiconductor and flat panel industry 

• Gas distribution systems 

• Medical gases 

• Hook-up applications 

Special Features: 

• Mechanical pressure gauge with diaphragm element 

• Compact design to minimize dead volume and particle generation 

• Helium leak tested (leak rate ≤ 10^-9 mbar · l/s) 

• Electropolished wetted parts (Ra < 0.25 μm) 

• Electropolished 316L process connector components with metal sealing disc 

Description: 

• Developed for high purity applications with limited space 

• Nominal sizes: 1″ and 1.3″ 

• Suitable for gaseous, liquid, and corrosive media up to 160 psi 

• Complies with SEMATECH and SEMI standards